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MEMSnet Home: MEMS-Talk: How to remove scallop polymer residual after STS2 DRIE
How to remove scallop polymer residual after STS2 DRIE
2015-12-14
Youmin Wang (2 parts)
2015-12-14
Mehmet Yilmaz (2 parts)
2015-12-14
Youmin Wang (2 parts)
2015-12-14
Mehmet Yilmaz (2 parts)
2015-12-14
Youmin Wang (2 parts)
How to remove scallop polymer residual after STS2 DRIE
Youmin Wang
2015-12-14
Hello Everyone,
I want to etch the silicon structure below to half of its heigh (from 2un
to 1um) in standard BOSCH process:
[image: Inline image 1]
However I got a lot of sidewalls un-removed:
[image: Inline image 2]
I tried with EKC270 post-etch cleaning but there are still quite a few
sidewalls still there, topview is like:
[image: Inline image 3]
Do you think whether my etching recipe has any problem, or you know whether
I can do something post-etch to clean those standing sidewalls? Thanks a
lot!
Best,
Youmin
‰PNG



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